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Specialty Implantation

                                                                   

Core's specialty implant service has over 20 years of  technology development in the production of non-traditional and exotic ion species utilizing a variety of substrates. This includes a capability to implant unusual and irregularly shaped substrates with over 70 different ion species

Key features & capability

  • The ability to implant from small samples up to 200 and 300 mm wafers with a wide range of ion species
  • GaAs and other compound semiconductors are regularly implanted with 28Si,29Si,Zn,Be,Mg,H,He,and O
  • Implant Energies from 1kev to 200 keV single charged
  • Doubly charge species ( for 400 keV)are routinely run
  • High tilt angles to 89 degrees
  • Low temperature implants to LN2 temperatures
  • High temperature implants to 650 C and higher
  • Process support for implant recipe generation, pre &post implant processing, and materials characterization

Dedicated Specialty Tools:

  • Indium implantation tool for 200 and 300 mm wafers
  • Germanium implantation expertise for pre amorphization-100 to 300 mm wafers
  • Dopant-free system for 100 to 150 mm wafers

Ample data demonstrating contamination control spanning 8 years

Ideal for pre amorphization and radiation treatment implants

  • Dedicated GaAs and other compound semiconductor wafer system

Fast tumaround for 100 mm wafers

  • Dedicated Helium and Hydrogen implantation systems

All Specialty implanters are calibrated to NIST traceable standards

Standard turn around for Specialty implants is 3-5 days, but with advanced notice,same-day cycle time can be arranged.

•Low temperature implants to LN2 temperatures          

•High temperature implants to 650 C and higher

•Process support for implant recipe generation, pre &post implant processing, and materials characterization

 Dedicated Specialty Tools: 

•Indium implantation tool for 200 and 300 mm wafers

•Germanium implantation expertise for pre amorphization-100 to 300 mm wafers 

•Dedicated GaAs and other compound semiconductor wafer system 

•Dedicated Helium and Hydrogen implantation systems

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