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Production Implantation Services

 

KingCore facility technology operate 24 hours by 5 days a week and serve ion implant requirements for 4inch to 6 inch wafers including IC, Discrete Device, SOI, PV and other advanced applications

Implant Process Capability

Recipe Category

Tool type

Species

Energy,kev

Does,

Ions/c㎡

notes

High Current

(batch)

NV10-80's

B/BF2,P,As,H

10-80kev

7E14-1E16+

 

NV10-160's

B/BF2,AI,As,

Sb,H,(P*)

10-160kev

7E14-1E16+

*NON-P tool

available

Mid Current

(Serial)

MC3's

B/BF2,P,As,In

5-750kev

5E11-1E15

 

6200 series

B/BF2,P,As

10-200kev

5E11-7E14

 

CF  Series

B/BF2,P,As

10-200kev

5E11-7E14

 

4200 series

Non-dopants

(Si,Ge)

10-200kev

5E11-1E16

 

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